Products
Cluster tool
The Multi-Chamber cluster coating system is a cluster of vacuum chamber systems interconnected through the transfer chamber which placed in center of cluster system.
Annealing Furnace
The annealing furnace is a process method used in the fabrication of semiconductors. This process includes heating a plurality of semiconductor wafers to affect their electrical properties.
Photolithography
Products for safe storage and handling of reticles,as well as mask aligners and uv meters.